Silicon Boat
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Silicon Boat
Silicon carbide boat from DSTC is a specialized silicon-based product used in various semiconductor manufacturing processes, it is also called silicon tower. Silicon Boat is designed in the shape of a boat or tray to hold and transport silicon wafers during different stages of production. Made from high-purity silicon, Silicon Boats offer excellent thermal stability and chemical resistance. SIC boats are crucial for ensuring the safe handling and protection of delicate silicon wafers during processes like cleaning, etching, and deposition. DSTC丨Sifusion's Silicon Boats are precision-engineered to accommodate multiple wafers, providing efficient and uniform processing. With their high-quality construction and reliability, Silicon Boats play a vital role in the semiconductor industry, contributing to the production of high-performance electronic devices.
Features of DSTC Silicon Boat
1
The sic boat is available to customize design of silicon boat structure. including the shape, length, angle, quntity of tooth.
2
High-temperature silicon boats as a silicon wafer carrier, can effectively reduce the contact damage of silicon wafers, and improve process yield.
3
Fused silicon boats can be replaced or fixed. It reduces the holding cost.
4
DSTC Silicon boat has a higher polysilicon deposition upper limit, which can effectively reduce the PM frequency of equipment and increase production capacity.
The Specifications of DSTC Silicon Boat
Sifusion Silicon Boat
Product Height
400mm-1300mm
Product Structure
Integrated Welding type, Splicing Type
Conductive Type/Doping
Custom
Resistivity
Low Resistance (e.g.<0015, <0.02...).
Moderate Resistance (e.g. 1-4)
Low Resistance (e.g.<0015, <0.02...).
Moderate Resistance (e.g. 1-4)
High Resistance (e.g. 60-90)
Customer Customization
Material Type
Polycrystal/Single Crystal
Operating Temperature
<1,250 ℃
Thermal Expansion Coefficient
3.8E-06/K(Same As Silicon Wafer)
Metal Contamination Residue
1E10 atom /cm²
Rail Bar Angle
Customized
Rail Tooth Shape
Customized
How DSTC Manufactures Silicon Boats?
Silicon Boats are manufactured using high-purity silicon materials through a precise manufacturing process. The process typically involves shaping the silicon into a boat or tray-like structure using precision machining or molding techniques. The silicon semiconductor material used is of high purity to ensure the desired properties and performance of the silicon tower.
Overall, followed by additional processing steps and quality control measures. This ensures that the Silicon Boats meet the stringent requirements of the semiconductor industry and provide reliable performance during wafer handling and transportation.
How DSTC Silicon Boats Improve Efficiency in Semiconductor Manufacturing
As a leading silicon semiconductor company, silicon boat by DSTC brings higher value in high temperature processes, mainly used in high temperature diffusion processes, operating temperatures somewhere between 900 and 1250 degrees. Specific applications include: annealing, oxidation, implantation/activation, Hybrid, etc.
How to Choose the Right Silicon Boat from DSTC for Your Manufacturing Needs
Perfectly match the high temperature process above 900℃.
Solve slip, scratch, particle and other process problems.
Reduce pm frequency, improve production efficiency.
Long service life, cost down.
Purity up to 13N, can avoid the risk of process contamination.
The delivery time is only 2 months, to meet the production needs.
Silicon Boat Gallery of DSTC
The Types of Silicon Boat Gallery of DSTC showcases a variety of boat-shaped containers made from high-purity silicon, designed to hold and transport silicon wafers during semiconductor manufacturing processes.
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